XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal
SMC · Angle and In-line Valves

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

Series: XL#2
Selected article XLA-40-2M9BLA-XN1A

Flange Size: 40 | Flange Type: None [KF(NW)] | Indicator/Pilot port direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side

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About this product

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

Technical information

Temperature 5 to 60°C
Flange Type None [KF(NW)]
Collection XL
Indicator/Pilot port direction w/o Indicator, Flange Side; Std. Indicator, Flange Side
Temperature/Heater 5 to 60°C
Auto Switch M9B--Solid State Switch, Gen. Purpose, 2 Wire, Horizontāls
Number of Autoswitches/Mounting position A (2pcs, Valve Open/Closed)
Body Surface Treatment External: Hard Anodized - Internal: Raw Material

Choose a variant

3 variants in this series

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